JPH0533856Y2 - - Google Patents

Info

Publication number
JPH0533856Y2
JPH0533856Y2 JP1985185703U JP18570385U JPH0533856Y2 JP H0533856 Y2 JPH0533856 Y2 JP H0533856Y2 JP 1985185703 U JP1985185703 U JP 1985185703U JP 18570385 U JP18570385 U JP 18570385U JP H0533856 Y2 JPH0533856 Y2 JP H0533856Y2
Authority
JP
Japan
Prior art keywords
outside air
air
clean room
unit
air conditioning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1985185703U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6293625U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985185703U priority Critical patent/JPH0533856Y2/ja
Publication of JPS6293625U publication Critical patent/JPS6293625U/ja
Application granted granted Critical
Publication of JPH0533856Y2 publication Critical patent/JPH0533856Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Central Air Conditioning (AREA)
  • Ventilation (AREA)
JP1985185703U 1985-12-02 1985-12-02 Expired - Lifetime JPH0533856Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985185703U JPH0533856Y2 (en]) 1985-12-02 1985-12-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985185703U JPH0533856Y2 (en]) 1985-12-02 1985-12-02

Publications (2)

Publication Number Publication Date
JPS6293625U JPS6293625U (en]) 1987-06-15
JPH0533856Y2 true JPH0533856Y2 (en]) 1993-08-27

Family

ID=31134580

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985185703U Expired - Lifetime JPH0533856Y2 (en]) 1985-12-02 1985-12-02

Country Status (1)

Country Link
JP (1) JPH0533856Y2 (en])

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5795536A (en) * 1980-12-05 1982-06-14 Takasago Thermal Eng Co Lts Apparatus for preparing work environment for manufacturing integrated circuits or the like

Also Published As

Publication number Publication date
JPS6293625U (en]) 1987-06-15

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